METHOD FOR ABATING OPTICAL DAMAGES OF SILICA OPTICAL COMPONENT BASED ON OVERALL TREATMENT THEREOF
PROBLEM TO BE SOLVED: To provide a method for abating or preventing damages brought on an optical component by a high-intensity light source (e.g., laser).SOLUTION: In one method for preventing damages brought on an optical component by a high-intensity light source, the optical component is anneale...
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Format: | Patent |
Sprache: | eng ; jpn |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a method for abating or preventing damages brought on an optical component by a high-intensity light source (e.g., laser).SOLUTION: In one method for preventing damages brought on an optical component by a high-intensity light source, the optical component is annealed over a specified period. Another method includes a step of etching an optical component within an etchant including one type of chemical species selected from among hydrofluoric acid, fluoride ions, and dihydrofluoride ions, a step of ultrasonically agitating the etchant between processes, and a step of subsequently rinsing the optical component within a rinsing bath.
【課題】強度の高い光源、例えばレーザにより光学部品に生じる損傷を軽減及び防止する方法の提供。【解決手段】強度の高い光源により光学部品に生じる損傷を防止する1つの方法は、光学部品を所定の時間アニーリングする。他の方法は、フッ化水素酸、フッ化物イオン及び二フッ化水素イオンのうちの1種の化学種を含むエッチング液中で光学部品をエッチングするステップと、プロセスの間にエッチング溶液を超音波で攪拌するステップと、次いで光学部品をすすぎ浴ですすぐステップと、を含む。【選択図】なし |
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