METHOD FOR DETECTING IMMERSION MEDIUM AND CONTROLLING SUPPLY OF IMMERSION MEDIUM

PROBLEM TO BE SOLVED: To further develop a method for detecting an immersion medium and controlling the supply of the immersion medium such that, without additionally specifically developed hardware components, independently from the ambient parameters such as filling level of a system or point of t...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	RALF STEINMEYER, TIMO ROJAHN, REINER MITZKUS
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
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