METHOD FOR DETECTING IMMERSION MEDIUM AND CONTROLLING SUPPLY OF IMMERSION MEDIUM

PROBLEM TO BE SOLVED: To further develop a method for detecting an immersion medium and controlling the supply of the immersion medium such that, without additionally specifically developed hardware components, independently from the ambient parameters such as filling level of a system or point of t...

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Bibliographische Detailangaben
Hauptverfasser: RALF STEINMEYER, TIMO ROJAHN, REINER MITZKUS
Format: Patent
Sprache:eng ; jpn
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Zusammenfassung:PROBLEM TO BE SOLVED: To further develop a method for detecting an immersion medium and controlling the supply of the immersion medium such that, without additionally specifically developed hardware components, independently from the ambient parameters such as filling level of a system or point of time of the last immersion, the supply of the immersion fluid can be controlled in such a way that the required amount is always available in the immersion film region.SOLUTION: According to the present invention, the state of the immersion film region is detected and evaluated in a detection unit 16 of a microscope or a detection unit 11 of an autofocus device through an autofocus signal of a light source and/or a reflection of a modulation object 6b arranged in the intermediate image plane of an incident light illumination part 6, and is transmitted to a control unit for the purpose of a change or an error treatment of an immersion process. 【課題】付加的に特別に開発されたハードウエアコンポーネント無しで、システムの充填状態または最終浸漬の時点のような環境パラメータに依存せずに、浸漬液の供給を、常に必要量が浸漬フィルム領域に存在するように制御することができるように、浸漬媒体の検出および供給制御方法をさらに発展させること。【解決手段】本発明によれば、光源のオートフォーカス信号および照射照明部6の中間画像面に配置された変調対象物6bの反射のうちの少なくとも一方を介して、浸漬フィルム領域1の状態が顕微鏡の検出ユニット16またはオートフォーカス装置の検出ユニット11において検出され、評価され、浸漬過程の変更ならびにエラー処理の目的で制御ユニットにさらに伝送される。【選択図】 図1