HEATING DEVICE FOR CORROSIVE LIQUID
PROBLEM TO BE SOLVED: To provide a heating device which is compact, capable of raising the temperature of a liquid in a short time and further capable of heating a corrosive liquid continuously supplied at a fixed flow rate to a fixed temperature.SOLUTION: The heating device configured to heat a cor...
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| Format: | Patent |
| Sprache: | eng ; jpn |
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| Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a heating device which is compact, capable of raising the temperature of a liquid in a short time and further capable of heating a corrosive liquid continuously supplied at a fixed flow rate to a fixed temperature.SOLUTION: The heating device configured to heat a corrosive liquid comprises a heater unit 1 and a heat insulation member 2 surrounding the heater unit 1 and including an inlet 21 and an outlet 22 for the liquid. The heater unit 1 includes: ceramic plates 12 and 13 formed from a compound material containing C or SiC and a heating element 11 for heating air-tightly provided inside. A channel 23 is provided which communicates to the inlet 21 and the outlet 22 and at least once spirally turns around the heater unit 1.
【課題】 コンパクトであって短時間で液体を昇温することができる上、一定の流量で連続的に供給される腐食性液体を一定の温度に加熱できる加熱装置を提供する。【解決手段】 腐食性の液体を加熱する加熱装置であって、ヒータユニット１とヒータユニット１を囲み且つ液体の入口２１と出口２２とを備えた断熱部材２とを有し、ヒータユニット１はＳｉＣまたはＳｉＣを含む複合材料からなるセラミックプレート１２、１３とその内部に気密に設けられた加熱用発熱体１１とを有し、これら入口２１及び出口２２に連通し且つヒータユニット１の周りを少なくとも１回螺旋状に旋回した流路２３が設けられている。【選択図】 図４ |
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