PARTICLE SIZE DISTRIBUTION MEASURING DEVICE

PROBLEM TO BE SOLVED: To provide a particle size distribution measuring device capable of calculating particle size distribution stably and accurately.SOLUTION: In a particle size distribution measuring device, a particle size distribution is calculated on the basis of characteristics of secondary light generated by irradiating inspection light to a particle group. In the particle size distribution calculation, a virtual solution of the particle size distribution is updated for a plurality of times so that the characteristics of secondary light calculated from the virtual solution becomes closer to the actual characteristics of secondary light obtained by actual measurement. In that time, a particle size distribution calculated by one iterative solution is applied to another iterative solution as a virtual solution, the particle size distribution is updated by the resulting particle size distribution as a new particle size distribution, and this procedure is repeated a plurality of times to calculate the particle size distribution. 【課題】精度良く、かつ、安定して粒子径分布を算出できる粒子径分布測定装置を提供する。【解決手段】検査光が粒子群に当たって生じる二次光の特性に基づいて粒子径分布が算出される。粒子径分布の算出において、粒子径分布の仮想解から算出される二次光の特性を実際の測定で得られた二次光の特性に近づけるべく仮想解を複数回更新する。その際、一の反復解法によって算出した粒子径分布を、別の反復解法に仮想解として与え、その結果算出された粒子径分布を新たな粒子径分布として更新し、この手順を複数回繰り返して粒子径分布を算出する。【選択図】図２