POLISHING CARRIER, POLISHING LIQUID COMPOSITION, AND POLISHING METHOD

PROBLEM TO BE SOLVED: To provide a carrier for polishing to obtain a polishing liquid composition capable of providing a sufficient polishing rate and surface smoothness, and showing little temporal deterioration of a polishing rate and surface smoothness; a polishing liquid composition using the sa...

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Bibliographische Detailangaben
1. Verfasser: OKIMOTO YOSHIO
Format: Patent
Sprache:eng ; jpn
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