INFRARED INSPECTION APPARATUS

PROBLEM TO BE SOLVED: To provide a technique for improving the accuracy of measuring a temperature difference around a surface of a structure and the accuracy of inspecting states such as defects and degradation of the surface of the structure in measurement and inspection using infrared.SOLUTION: An inspection apparatus 1A includes: a pulse laser 2 irradiating an object 5 with a pulse-like laser; a scan mirror 23 scanning the object 5; an infrared sensor 3 detecting infrared generated from the object 5; a control unit 11A controlling the irradiation of the pulse laser 2, an angle of the scan mirror 23, and the detection of the infrared sensor 3 so that a plurality of measurements of temperature differences according to whether a laser beam is irradiated are performed on each measured point; an image generation unit 12A generating an image including a temperature difference distribution in a region of the object 5 on the basis of a measured value of the temperature difference and the angle of the scan mirror; and a defect extraction unit 13A determining and extracting defective or degraded portions using the image. 【課題】赤外線を用いた計測及び検査に関し、構造物の表面付近における温度差の計測の精度、及び欠陥や劣化等の状態の検査の精度を向上させることができる技術を提供する。【解決手段】検査装置１Ａは、対象物５に対しパルス状のレーザを照射するパルスレーザ２と、対象物５上を走査するための走査ミラー２３と、対象物５から生じる赤外線を検出する赤外線センサ３と、被計測点ごとにレーザ光の照射有無に応じた温度差の計測を複数回行うように、パルスレーザ２の照射、走査ミラー２３の角度、及び赤外線センサ３の検出を制御する制御部１１Ａと、温度差の計測値及び走査ミラーの角度に基づき、対象物５の領域の温度差の分布を含む画像を生成する画像生成部１２Ａと、画像を用いて欠陥または劣化の部分を判定して抽出する欠陥抽出部１３Ａとを有する。【選択図】図１