DEFECT REPAIR METHOD FOR GRAPHENE FILM, AND TRANSMISSIVITY MEASURING APPARATUS FOR GRAPHENE FILM

PROBLEM TO BE SOLVED: To provide a measuring apparatus capable of measuring a local transmissivity of a graphene film in a micrometer order, and a defect repair method for the graphene film.SOLUTION: A defect repair method for a graphene film includes detecting a defective spot of the graphene film on a local area of the graphene film by Raman spectroscopic measurement, and irradiating the defective spot with a laser beam to repair the defective spot of the graphene film. The repairing of the defective spot of the local area includes: performing resonance Raman scattering measurement; identifying a local area in which a D band appears as the defective spot of the graphene film when a maximum peak intensity of a spectrum obtained by the resonance Raman scattering measurement in a range of 1310 cmor more and 1350 cmor less is defined as D; and irradiating a spot identified as the defective spot of the graphene film with the laser beam while supplying a carbon source to the spot to thereby repair the defect by filling it with the carbon source. 【課題】グラフェン膜のマイクロメートルオーダーの局所的な透過率を測定可能な測定装置及びグラフェン膜の欠陥修復方法を提供する。【解決手段】グラフェン膜の欠陥修復方法は、グラフェン膜の局所領域におけるラマン分光測定によりグラフェン膜の欠陥個所を検出し、該欠陥個所にレーザーを照射して、前記グラフェン膜の欠陥個所を修復するグラフェン膜の欠陥修復方法であって、前記局所領域の欠陥個所の修復は、共鳴ラマン散乱測定を行い、前記共鳴ラマン散乱測定において得られるスペクトルで、１３１０ｃｍ−１以上１３５０ｃｍ−１以下の範囲内での最大のピーク強度をＤとしたときに、Ｄバンドが現れる局所的な領域を前記グラフェン膜の欠陥個所として識別し、前記グラフェン膜の欠陥個所として識別された個所にカーボンソースを与えながらレーザーを照射して、該欠陥に前記カーボンソースを充填して修復を行なう。【選択図】図１