APPARATUS FOR FORMING ORGANIC MOLECULE FILM, AND FORMING METHOD

PROBLEM TO BE SOLVED: To provide an apparatus for forming an organic molecule film high in the degree of freedom of an object to be processed which can be targeted for processing thereby, and in the degree of freedom of the characteristic of a film surface to form an organic molecule film on; and a method of forming an organic molecule film.SOLUTION: An apparatus 100 for forming an organic molecule film on an object to be processed comprises: a process chamber 11 into which an object to be processed is loaded; an organic material gas supply part 2 for supplying an organic material gas into the process chamber 11; and an ultraviolet light-irradiation part 13 for irradiating, of the object to be processed, the organic material gas supplied to the object to be processed, and a film formed on a surface of the object to be processed, one to three objects with ultraviolet light. The ultraviolet light-irradiation part 13 irradiates one to three objects of the object to be processed, the organic material gas supplied to the object to be processed, and a film formed on a surface of the object to be processed with ultraviolet light, thereby activating the surface of the object to be processed and/or the formed organic molecule film. 【課題】適用される被処理体や、形成される膜表面の性状の自由度の高い有機分子膜の形成装置および形成方法を提供する。【解決手段】被処理体上に有機分子膜を形成する有機分子膜の形成装置１００は、被処理体を収容する処理チャンバ１１と、処理チャンバ１１内に有機材料ガスを供給する有機材料ガス供給部２と、被処理体、および／または、被処理体に供給される有機材料ガス、および／または、被処理体の表面に形成された膜に紫外線を照射する紫外線照射部１３とを有し、紫外線照射部１３により、被処理体、および／または、被処理体に供給される有機材料ガス、および／または、被処理体の表面に形成された膜に紫外線を照射し、被処理体表面および／または形成される有機分子膜を活性化する。【選択図】図１