OPTICAL DEVICE HAVING DEFORMABLE OPTICAL ELEMENT

PROBLEM TO BE SOLVED: To provide an optical device capable of deforming an optical element in order to correct imaging errors.SOLUTION: The invention is related to an optical device 108 for a micro-lithograph comprising: an optical module 109; and a support structure part 110 for supporting the opti...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MANFRED STEINBACH, ARMIN SCHOEPPACH
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!