VACUUM PROCESSING APPARATUS, AND VIBRATION CONTROL DEVICE

PROBLEM TO BE SOLVED: To damp vibration of a vibration control object disposed in a vacuum tank.SOLUTION: The fixing part 20 of a vibration control device 5 is fixed on the vibration control object in the vacuum tank, and the vibration control device 5 damps vibration of the vibration control object...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MACHIYA KENJI, SAKAUCHI YUYA, NAKAO HIROTOSHI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING LIGHTING MEANS FOR DAMPING VIBRATION MECHANICAL ENGINEERING SEMICONDUCTOR DEVICES SHOCK-ABSORBERS SPRINGS THERMAL INSULATION IN GENERAL WEAPONS
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