APPARATUS FOR RECOVERING COOLANT IN WIRE SAW SLURRY WASTE LIQUID

PROBLEM TO BE SOLVED: To provide an apparatus for recovering a coolant in a wire saw slurry waste liquid where all of a liquid in the slurry waste liquid can be recovered and reused as a regenerated coolant at low running cost.SOLUTION: An apparatus for recovering a coolant in a wire saw slurry wast...

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Bibliographische Detailangaben
Hauptverfasser:	TAKASU MIKIO, OKUMA NOBUO, NISHIMURA KENJI, KONNO KEI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS DRESSING OR CONDITIONING OF ABRADING SURFACES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an apparatus for recovering a coolant in a wire saw slurry waste liquid where all of a liquid in the slurry waste liquid can be recovered and reused as a regenerated coolant at low running cost.SOLUTION: An apparatus for recovering a coolant in a wire saw slurry waste liquid comprises: a centrifugal separator 6 to introduce a slurry waste liquid 4 discharged from a loose abrasive grain type wire saw 1 and stored in a slurry waste liquid receiving tank 5 and separate to a solid 8 including an abrasive grain and a coolant waste liquid 14; a coolant waste liquid receiving tank 17 to store the coolant waste liquid 14 from the centrifugal separator 6; and a ceramic filter device 19 to separate and recover a regenerated coolant 20 from the coolant waste liquid 14 recycled and introduced from the coolant waste liquid receiving tank 17. 【課題】低いランニングコストでスラリ廃液の液分を全て再生クーラントとして回収し再利用できるようにしたワイヤソースラリ廃液のクーラント回収装置を提供する。【解決手段】遊離砥粒式ワイヤソー１から排出されてスラリ廃液受入タンク５に貯留されたスラリ廃液４を導入して砥粒を含む固形分８とクーラント廃液１４とに分離する遠心分離装置６と、遠心分離装置６からのクーラント廃液１４を貯留するクーラント廃液受入タンク１７と、クーラント廃液受入タンク１７のクーラント廃液１４を循環導入しクーラント廃液１４から再生クーラント２０を分離して回収するセラミック濾過装置１９とを有する。【選択図】図１