RECEPTION DEVICE OF WORKPIECE

PROBLEM TO BE SOLVED: To provide a reception device of a workpiece having high cooling efficiency, which allows for compaction of a workpiece processing system, while reducing the usage of gas and the energy consumption incident to supply and exhaust of gas.SOLUTION: A reception device 1 of a semico...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SHIGETA TAKASHI, TAKAOKA SHUNJI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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