LIGHT RADIATION DEVICE

PROBLEM TO BE SOLVED: To block vortex airflow formed in a space formed among a gas outlet, a lamp, and a radiated surface and thereby prevent powder flown by the vortex airflow from adhering to the lamp.SOLUTION: A light radiation device includes: a lamp 4 which radiates light toward a radiated surf...

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1. Verfasser:	HIROI KAZUNORI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To block vortex airflow formed in a space formed among a gas outlet, a lamp, and a radiated surface and thereby prevent powder flown by the vortex airflow from adhering to the lamp.SOLUTION: A light radiation device includes: a lamp 4 which radiates light toward a radiated surface Wa; a gas supply part 5 having a gas outlet 51x which is disposed at the lateral side of the lamp 4 and blows out a gas to side surfaces 41c, 41d of the lamp 4; and a shield body 6 which is provided between the gas outlet 51x and the lamp 4 so as to be located close to the radiated surface Wa side than the gas outlet 51x.