SUBSTRATE HOLDING DEVICE AND DROPLET DISCHARGE DEVICE

PROBLEM TO BE SOLVED: To hold a substrate in which an active part is formed while correcting a warp of the substrate.SOLUTION: A substrate holding device for holding a substrate in which an active part is formed on one surface of the substrate comprises a holding part for holding the substrate in a...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
1. Verfasser:	YAHIRO YUKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To hold a substrate in which an active part is formed while correcting a warp of the substrate.SOLUTION: A substrate holding device for holding a substrate in which an active part is formed on one surface of the substrate comprises a holding part for holding the substrate in a state inclining in a direction where a peripheral part of the substrate projects toward the side of the active part.