EMITTER STRUCTURE, GAS ION SOURCE, AND FOCUSED ION BEAM DEVICE

EMITTER STRUCTURE, GAS ION SOURCE, AND FOCUSED ION BEAM DEVICE

PROBLEM TO BE SOLVED: To provide an emitter structure which can enhance the cooling efficiency of an emitter, and can hold the emitter stably with high accuracy for a base member, while reducing the number of components or simplifying the device, and to provide a gas ion source and a focused ion bea...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YASAKA KOJIN, SUGIYAMA YASUHIKO, OBA HIROSHI
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide an emitter structure which can enhance the cooling efficiency of an emitter, and can hold the emitter stably with high accuracy for a base member, while reducing the number of components or simplifying the device, and to provide a gas ion source and a focused ion beam device.SOLUTION: An emitter structure includes a pair of electrification pins 65 fixed to a base material 61, a filament 66 connected between the pair of electrification pins 65, and an emitter 52 connected with the filament 66 and having a sharpened tip. A support member 54 is fixed to the base material 61, and the emitter 52 is connected with the support member 54.