VAPOR DEPOSITION APPARATUS

PROBLEM TO BE SOLVED: To provide an evaporation source capable of preventing occurrence of dispersion of a temperature in a crucible, and having a small energy loss, in a vapor deposition apparatus having a linear evaporation source having a long crucible.SOLUTION: In an evaporation source 4 having...

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Bibliographische Detailangaben
Hauptverfasser:	OGATA TOMOHIKO, MOCHIZUKI MASAAKI, KOTAKE HIDEO, MATSUURA HIROYASU, MINEKAWA HIDEAKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an evaporation source capable of preventing occurrence of dispersion of a temperature in a crucible, and having a small energy loss, in a vapor deposition apparatus having a linear evaporation source having a long crucible.SOLUTION: In an evaporation source 4 having a crucible 22 extending in a first direction, and having a plurality of openings 34 opened side by side in the first direction on the upper surface, and a heater 23 which is first heating means arranged on the outside of the crucible 22, for heating the crucible 22, the reflection surface of each inclined reflection board 41 which is second heating means provided along the surface extending in the first direction of the crucible 22 on the outside of the crucible 22 is arranged toward each end in the first direction of the crucible 22.