SURFACE INCLINATION AMOUNT DETECTION DEVICE, PROCESSING POSITION CONTROL DEVICE, AND LASER PROCESSING DEVICE
PROBLEM TO BE SOLVED: To obtain a surface inclination amount detection device which easily detects a surface inclination of the galvano mirror by a simple configuration.SOLUTION: The surface inclination detection device includes: a part 11Y to be detected as a first electrode which is arranged on a...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To obtain a surface inclination amount detection device which easily detects a surface inclination of the galvano mirror by a simple configuration.SOLUTION: The surface inclination detection device includes: a part 11Y to be detected as a first electrode which is arranged on a revolving shaft of a galvano mirror 3Y for causing laser beams to be deflected to a processing position set in a processing area and performing the same operation as that of the galvano mirror 3Y; a fixed electrode 14Y as a second electrode which is fixedly arranged away from the part 11Y to be detected for a prescribed distance; a voltage detection part for detecting an interelectrode voltage corresponding to an electrostatic capacitance between the part 11Y to be detected and the fixed electrode 14Y; and a surface inclination amount detection part for detecting a surface inclination amount of the galvano mirror 3Y based on the interelectrode voltage. The surface inclination detection part calculates an interelectrode distance which is a distance between the part 11Y to be detected and the fixed electrode 14Y as an amount of surface inclination of the galvano mirror 3Y. |
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