SEMICONDUCTOR EVALUATION DEVICE AND SEMICONDUCTOR EVALUATION METHOD

PROBLEM TO BE SOLVED: To provide a semiconductor evaluation device and a semiconductor evaluation method, which can achieve high accuracy in measurement and high space resolution.SOLUTION: A semiconductor evaluation device 100 comprises: an excitation light irradiation part 10 for irradiation excitation light L1 on an evaluation surface S0 of a semiconductor S, which is an evaluation object along a first direction and in a linear manner; a light detection part 20 for detecting photoluminescence light L2 emitted from the semiconductor S due to the excitation light L1; and an evaluation part 30 for calculating a predetermined evaluation indicator relevant to crystallinity of the semiconductor S based on an intensity of the photoluminescence light L2 detected by the light detection part.