PLASMA PROCESSING APPARATUS

PROBLEM TO BE SOLVED: To provide a plasma processing apparatus capable of inhibiting the adhesion of foreign matter to a gas supply channel surface and the pollution of the gas supply channel surface.SOLUTION: A plasma processing apparatus includes: a vacuum case 14; a processing chamber for perform...

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Bibliographische Detailangaben
Hauptverfasser:	HASHIMOTO TAKAHISA, SAKAI YOSUKE, ARASE TAKAO, YOKOGAWA KATANOBU, MORI MASASHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a plasma processing apparatus capable of inhibiting the adhesion of foreign matter to a gas supply channel surface and the pollution of the gas supply channel surface.SOLUTION: A plasma processing apparatus includes: a vacuum case 14; a processing chamber for performing surface treatment of a sample-to-be-processed 2 by plasma; sample-to-be-treated-and-processed installation means 1; an upper electrode 3 that has a gas channel 102 and a large number of micropores 6; a gas shield plate 103 that is arranged within the gas channel 102 of the upper electrode 3 to open/close the micropores 6; and a drive unit 101 for driving the gas shield plate 103.