MANUFACTURING METHOD OF MOSAIC DIAMOND

PROBLEM TO BE SOLVED: To provide a manufacturing method of mosaic diamond which avoids breakage of a diamond single crystal substrate, and can effectively and stably produce a large amount of mosaic diamond.SOLUTION: A manufacturing method of mosaic diamond includes steps of: forming a non-diamond l...

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Hauptverfasser: YAMADA HIDEAKI, SHIKADA SHINICHI, CHAYAHARA AKIYOSHI, MOKUNO YOSHIAKI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a manufacturing method of mosaic diamond which avoids breakage of a diamond single crystal substrate, and can effectively and stably produce a large amount of mosaic diamond.SOLUTION: A manufacturing method of mosaic diamond includes steps of: forming a non-diamond layer by implanting ions in the vicinity of a surface of multiple diamond single crystal substrates arranged in mosaic or a mosaic diamond single crystal substrate of which back side is bonded with a single crystal diamond layer; growing the single crystal diamond layer by a vapor phase synthetic method; etching the non-surface layer; and separating the single crystal diamond layer which is an upper layer of the non-diamond layer. The mosaic diamond can be provided relatively easily compared to a conventional method.