METHOD OF FABRICATING SOLAR CELL
PROBLEM TO BE SOLVED: To provide a method of fabricating a solar cell using a printed contact mask.SOLUTION: A contact mask 400 may include dots 306 formed by inkjet printing. The dots 306 may be formed in openings between dielectric layers, e.g., polyimide. Intersections of overlapping dots 306 may...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a method of fabricating a solar cell using a printed contact mask.SOLUTION: A contact mask 400 may include dots 306 formed by inkjet printing. The dots 306 may be formed in openings between dielectric layers, e.g., polyimide. Intersections of overlapping dots 306 may form gaps 321 that define contact regions. The spacing of the gaps 321 may be dictated by the alignment of nozzles that dispense the dots 306. Using the dots 306 as a contact mask 400, an underlying dielectric layer may be etched to form the contact regions penetrating through the underlying dielectric layer. Metal contact fingers may be formed over a wafer to form electrical connections to corresponding diffusion regions through the contact regions. |
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