SENSOR CHIP

SENSOR CHIP

PROBLEM TO BE SOLVED: To provide a sensor chip capable of improving detection sensitivity.SOLUTION: The sensor chip includes: an optical waveguide part; a sensing area provided on the optical waveguide part; a pair of optical element parts provided on the optical waveguide part to sandwich the sensi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KASAI SHINGO, WADA TAKAKI, TONO ICHIRO, YAMAUCHI TAKEMOTO, ISHIDA CHIO
Format: Patent
Sprache:eng
Schlagworte:
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a sensor chip capable of improving detection sensitivity.SOLUTION: The sensor chip includes: an optical waveguide part; a sensing area provided on the optical waveguide part; a pair of optical element parts provided on the optical waveguide part to sandwich the sensing area between them; a junction part provided on the side where the optical element parts are provided on the optical waveguide part, having first pores where the optical element parts are exposed; and a chamber part provided on the junction part. Gas exists in the first pores.