PRESSURE SENSOR

PROBLEM TO BE SOLVED: To provide a pressure sensor integrated with high density.SOLUTION: A pressure sensor includes: a measurement element 3 that converts a variable number mechanically measured into an electric signal; and a signal converter 4 that further processes the electric signal from the me...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: PETER THIELE, CHRISTIAN WOHLGEMUTH
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a pressure sensor integrated with high density.SOLUTION: A pressure sensor includes: a measurement element 3 that converts a variable number mechanically measured into an electric signal; and a signal converter 4 that further processes the electric signal from the measurement element 3. The pressure sensor further includes: a substrate 1; and a first diaphragm 5 that forms a first closed cavity 6 including an inactive sealing medium. On at least one side of the measurement element 3 of the pressure sensor, an active surface is provided that is in direct contact with the sealing medium within the first cavity 6. The signal converter 4 is arranged on the substrate 1 in the form of an unhoused integrated circuit. The pressure sensor is suitable for measuring relative pressure or differential pressure.