GETTER MEMBER STORAGE TOOL, GETTER DEVICE, AND GETTER PUMP
PROBLEM TO BE SOLVED: To provide a getter pump capable of efficiently utilizing radiation heat from a heater to uniformly activate a getter member.SOLUTION: A getter pump includes a container 11, a getter device 13 accommodated in the container 11 and in which a plurality of disk-like getter members...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a getter pump capable of efficiently utilizing radiation heat from a heater to uniformly activate a getter member.SOLUTION: A getter pump includes a container 11, a getter device 13 accommodated in the container 11 and in which a plurality of disk-like getter members 14 are accommodated vertically in a form of one or more stages, and heating means 12 for heating the getter members 14, accommodated in the container 11 and arranged to face the getter members 14 accommodated in the getter device 13. |
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