ELECTRONIC ELEMENT, AND MANUFACTURING METHOD OF ELECTRONIC ELEMENT
PROBLEM TO BE SOLVED: To provide an electronic element capable of suppressing a leakage current between an upper electrode and a lower electrode irrespective of an angle of the electrodes and a side wall of a ferroelectric thin film, and a thickness of the electrodes.SOLUTION: In an electronic eleme...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide an electronic element capable of suppressing a leakage current between an upper electrode and a lower electrode irrespective of an angle of the electrodes and a side wall of a ferroelectric thin film, and a thickness of the electrodes.SOLUTION: In an electronic element, a ferroelectric thin film is sandwiched between a lower electrode and an upper electrode; a first insulating film covers at least a part of an area of a surface of the lower electrode that is opposite to the ferroelectric thin film; and the upper electrode and ends on the lower electrode side of side walls of the ferroelectric thin film are located on the first insulating film. |
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