ELECTROMECHANICAL CONVERSION ELEMENT, MANUFACTURING METHOD OF ELECTROMECHANICAL CONVERSION ELEMENT, DRIVING METHOD OF ELECTROMECHANICAL CONVERSION ELEMENT, DROPLET DISCHARGE HEAD, AND IMAGE FORMING APPARATUS

PROBLEM TO BE SOLVED: To provide an electromechanical conversion element that has high reliability, and has suppressed the occurrence of an imprint phenomenon without providing a new film in a layered configuration.SOLUTION: An electromechanical conversion element 9 includes a lower electrode 6, a p...

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Hauptverfasser:	MACHIDA OSAMU, TAKEUCHI JUN, WATANABE YASUHIRO, AKIYAMA ZENICHI, SHIMOFUKU HIKARI
Format:	Patent
Sprache:	eng
Schlagworte:	CORRECTION OF TYPOGRAPHICAL ERRORS ELECTRICITY i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME LINING MACHINES PERFORMING OPERATIONS PRINTING SELECTIVE PRINTING MECHANISMS STAMPS TRANSPORTING TYPEWRITERS
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Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an electromechanical conversion element that has high reliability, and has suppressed the occurrence of an imprint phenomenon without providing a new film in a layered configuration.SOLUTION: An electromechanical conversion element 9 includes a lower electrode 6, a piezoelectric film 7, and an upper electrode 8, which are sequentially formed on a substrate 5 having a pressure chamber 4 formed therein. The upper electrode 8 comprises a first upper electrode 8a that is formed at a position corresponding to a liquid chamber formation position in the substrate 5, and a second upper electrode 8b that is separated from the first upper electrode 8a and formed at a position corresponding to a liquid chamber non-formation position in the substrate 5.