PHYSICAL QUANTITY SENSOR

PROBLEM TO BE SOLVED: To provide a physical quantity sensor capable of bringing a frequency band which can be measured by the physical quantity sensor close to the resonance frequency of a structure.SOLUTION: A physical quantity sensor includes: a sensor portion 1, a signal processing portion 2; a s...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: UEDA HIDEKI, MORI TAKASHI, IBARA NOBUYUKI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a physical quantity sensor capable of bringing a frequency band which can be measured by the physical quantity sensor close to the resonance frequency of a structure.SOLUTION: A physical quantity sensor includes: a sensor portion 1, a signal processing portion 2; a selection circuit 21 for performing predetermined signal processing on physical quantity measured by the sensor portion 1; a signal conversion circuit 22; a digital signal correction circuit 23; and a Fourier conversion circuit 25 for converting changes in the physical quantity into frequency components. A servo control circuit 26 applies servo voltage on a servo voltage applying electrode to suppress the action of the sensor portion 1, when the frequency components converted by the Fourier conversion circuit 25 includes frequencies neat the resonance frequency of the sensor 1.