METHOD FOR PRODUCING SINGLE CRYSTAL GRAPHENE, AND TOUCH PANEL USING SINGLE CRYSTAL GRAPHENE

PROBLEM TO BE SOLVED: To provide a method for producing hexagonal graphene or a continuous graphene film by CVD using a carbon source such as camphor.SOLUTION: Provided is a method for producing single crystal graphene by pyrolysis of a carbon source, comprising: placing a compound, which is the car...

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Bibliographische Detailangaben
Hauptverfasser:	GOLAP KALITA, SUBASH SHARMA, TANEMURA MASAYUKI, UMENO MASAYOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOUNDS THEREOF CRYSTAL GROWTH DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a method for producing hexagonal graphene or a continuous graphene film by CVD using a carbon source such as camphor.SOLUTION: Provided is a method for producing single crystal graphene by pyrolysis of a carbon source, comprising: placing a compound, which is the carbon source, on a first region; placing a substrate on a second region; vaporizing the compound by heating the first region; introducing the vapor of camphor into the heated second region with a carrier gas including at least argon and hydrogen; pyrolyzing the carbon compound on the substrate in the heated second region; and thereby forming a plurality of graphene domains on the substrate surface or forming graphene continuously on the entire substrate surface.