PLASMA HEAT TREATMENT DEVICE

PROBLEM TO BE SOLVED: To provide a plasma heat treatment device capable of controlling temperature distribution in an electrode plane without increasing input power even when a large-diameter heated sample is heated using plasma.SOLUTION: A plasma heat treatment device comprises: a processing chambe...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MIYAKE MASATOSHI, KAWASAKI HIROMICHI, UEMURA TAKASHI, YOKOGAWA KATANOBU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS SEMICONDUCTOR DEVICES
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