CHARGED PARTICLE BEAM DEVICE

PROBLEM TO BE SOLVED: To solve such a problem that when acquiring an image of high magnification only in an arbitrary direction, in order to prevent shrinkage reduction by dispersing dose of fine pattern, deflection aberration due to deflection in the other direction in the plane coordinate axes is...

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Bibliographische Detailangaben
Hauptverfasser:	TAKAHASHI NORIJI, OHASHI KENYOSHI, HAYATA YASUNARI, KAWANO HAJIME, KOMURO OSAMU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To solve such a problem that when acquiring an image of high magnification only in an arbitrary direction, in order to prevent shrinkage reduction by dispersing dose of fine pattern, deflection aberration due to deflection in the other direction in the plane coordinate axes is actualized.SOLUTION: Images of different vertical and horizontal pixel sizes are acquired by changing a plurality of combination conditions of the intensity ratio and rotation angle of a deflector. The intensity ratio and rotation angle are determined based on the variation of the image in the direction of larger pixel size. Deflection aberration can be reduced when performing measurement in the X direction with high accuracy, while extending the field of view in the Y direction.