LASER PROCESSING APPARATUS

PROBLEM TO BE SOLVED: To provide a galvano scanner that can easily prevent plane tilt of a galvano mirror and prevent a processing position from being displaced.SOLUTION: A magnet 33X is arranged in the vicinity of a back face of a conductive galvano mirror 35X, or arranged in the vicinity of a cond...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	HOKODATE TOSHIYUKI, UCHIYAMA KENGO, TAKAHASHI NAOHIRO, TAKAHASHI YOSHIFUMI
Format:	Patent
Sprache:	eng
Schlagworte:	CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS SOLDERING OR UNSOLDERING TRANSPORTING WELDING WORKING BY LASER BEAM
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a galvano scanner that can easily prevent plane tilt of a galvano mirror and prevent a processing position from being displaced.SOLUTION: A magnet 33X is arranged in the vicinity of a back face of a conductive galvano mirror 35X, or arranged in the vicinity of a conductive member 32X fixed to a galvano mirror 351X. Thus, if a plane tilt occurs, a Lorentz force for suppressing the plane tilt acts on the galvano mirror 35X or on the conductive member 32X, suppressing the plane tilt.