LIGHT-SENSITIVE ELEMENT AND DISPLAY PANEL INCLUDING THE SAME
PROBLEM TO BE SOLVED: To provide a highly-efficient light-sensitive element which does not need a high-temperature post-annealing step and can be integrated into a low-temperature polysilicon thin film transistor, and a display panel including the light-sensitive element.SOLUTION: A light-sensitive...
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creator | CHO AN-THUNG SUN MING-WEI PENG CHIA-TIEN LIU WAN-YI CHO SHII |
description | PROBLEM TO BE SOLVED: To provide a highly-efficient light-sensitive element which does not need a high-temperature post-annealing step and can be integrated into a low-temperature polysilicon thin film transistor, and a display panel including the light-sensitive element.SOLUTION: A light-sensitive element includes: a substrate; a first conductive layer formed on the substrate; a silicon rich dielectric layer which is formed on the first conductive layer and includes a plurality of laser induced aggregation silicon nanodots formed by inducing silicon rich aggregation by laser annealing and whose density thereof is about 1×10/cmto 1×10/cm; and a second conductive layer formed on the silicon rich dielectric layer. Any of the substrate, the first conductive layer, and the second conductive layer is composed of a material which can transmit a laser beam of the laser annealing. |
format | Patent |
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Any of the substrate, the first conductive layer, and the second conductive layer is composed of a material which can transmit a laser beam of the laser annealing.</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES ; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES ; NANOTECHNOLOGY ; PERFORMING OPERATIONS ; SEMICONDUCTOR DEVICES ; SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES ; TRANSPORTING</subject><creationdate>2014</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20140703&DB=EPODOC&CC=JP&NR=2014123730A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25563,76418</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20140703&DB=EPODOC&CC=JP&NR=2014123730A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>CHO AN-THUNG</creatorcontrib><creatorcontrib>SUN MING-WEI</creatorcontrib><creatorcontrib>PENG CHIA-TIEN</creatorcontrib><creatorcontrib>LIU WAN-YI</creatorcontrib><creatorcontrib>CHO SHII</creatorcontrib><title>LIGHT-SENSITIVE ELEMENT AND DISPLAY PANEL INCLUDING THE SAME</title><description>PROBLEM TO BE SOLVED: To provide a highly-efficient light-sensitive element which does not need a high-temperature post-annealing step and can be integrated into a low-temperature polysilicon thin film transistor, and a display panel including the light-sensitive element.SOLUTION: A light-sensitive element includes: a substrate; a first conductive layer formed on the substrate; a silicon rich dielectric layer which is formed on the first conductive layer and includes a plurality of laser induced aggregation silicon nanodots formed by inducing silicon rich aggregation by laser annealing and whose density thereof is about 1×10/cmto 1×10/cm; and a second conductive layer formed on the silicon rich dielectric layer. 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Any of the substrate, the first conductive layer, and the second conductive layer is composed of a material which can transmit a laser beam of the laser annealing.</abstract><oa>free_for_read</oa></addata></record> |
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subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MANUFACTURE OR TREATMENT OF NANOSTRUCTURES MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES NANOTECHNOLOGY PERFORMING OPERATIONS SEMICONDUCTOR DEVICES SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES TRANSPORTING |
title | LIGHT-SENSITIVE ELEMENT AND DISPLAY PANEL INCLUDING THE SAME |
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