LIGHT-SENSITIVE ELEMENT AND DISPLAY PANEL INCLUDING THE SAME

PROBLEM TO BE SOLVED: To provide a highly-efficient light-sensitive element which does not need a high-temperature post-annealing step and can be integrated into a low-temperature polysilicon thin film transistor, and a display panel including the light-sensitive element.SOLUTION: A light-sensitive...

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Hauptverfasser: CHO AN-THUNG, SUN MING-WEI, PENG CHIA-TIEN, LIU WAN-YI, CHO SHII
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creator CHO AN-THUNG
SUN MING-WEI
PENG CHIA-TIEN
LIU WAN-YI
CHO SHII
description PROBLEM TO BE SOLVED: To provide a highly-efficient light-sensitive element which does not need a high-temperature post-annealing step and can be integrated into a low-temperature polysilicon thin film transistor, and a display panel including the light-sensitive element.SOLUTION: A light-sensitive element includes: a substrate; a first conductive layer formed on the substrate; a silicon rich dielectric layer which is formed on the first conductive layer and includes a plurality of laser induced aggregation silicon nanodots formed by inducing silicon rich aggregation by laser annealing and whose density thereof is about 1×10/cmto 1×10/cm; and a second conductive layer formed on the silicon rich dielectric layer. Any of the substrate, the first conductive layer, and the second conductive layer is composed of a material which can transmit a laser beam of the laser annealing.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES
NANOTECHNOLOGY
PERFORMING OPERATIONS
SEMICONDUCTOR DEVICES
SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
TRANSPORTING
title LIGHT-SENSITIVE ELEMENT AND DISPLAY PANEL INCLUDING THE SAME
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