LIGHT-SENSITIVE ELEMENT AND DISPLAY PANEL INCLUDING THE SAME
PROBLEM TO BE SOLVED: To provide a highly-efficient light-sensitive element which does not need a high-temperature post-annealing step and can be integrated into a low-temperature polysilicon thin film transistor, and a display panel including the light-sensitive element.SOLUTION: A light-sensitive...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a highly-efficient light-sensitive element which does not need a high-temperature post-annealing step and can be integrated into a low-temperature polysilicon thin film transistor, and a display panel including the light-sensitive element.SOLUTION: A light-sensitive element includes: a substrate; a first conductive layer formed on the substrate; a silicon rich dielectric layer which is formed on the first conductive layer and includes a plurality of laser induced aggregation silicon nanodots formed by inducing silicon rich aggregation by laser annealing and whose density thereof is about 1×10/cmto 1×10/cm; and a second conductive layer formed on the silicon rich dielectric layer. Any of the substrate, the first conductive layer, and the second conductive layer is composed of a material which can transmit a laser beam of the laser annealing. |
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