METAL-CERAMIC COMPOSITE MATERIAL, AND METHOD FOR MANUFACTURING THE SAME

PROBLEM TO BE SOLVED: To provide a composite material which has sufficient rigidity and thermal conductivity as a component of a semiconductor manufacturing apparatus or the like, and can further extend a temperature range exhibiting a low thermal expansion property, and to provide a method for manu...

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Bibliographische Detailangaben
1. Verfasser:	HIKITA TOMOYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	ALLOYS CASTING CASTING OF METALS CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES CHEMISTRY FERROUS OR NON-FERROUS ALLOYS METALLURGY PERFORMING OPERATIONS POWDER METALLURGY TRANSPORTING TREATMENT OF ALLOYS OR NON-FERROUS METALS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a composite material which has sufficient rigidity and thermal conductivity as a component of a semiconductor manufacturing apparatus or the like, and can further extend a temperature range exhibiting a low thermal expansion property, and to provide a method for manufacturing the same.SOLUTION: A metal-ceramic composite material according to a first mode of the present invention is combined with a base material formed of Al or an Al alloy, ZWP and SiC. A filling rate of the ZWP and the SiC is included in a range of 75-81 vol.%, and a volume ratio of the SiC with respect to the ZWP is included in a range of 0.13-0.42.