PROTECTIVE FILM FOR SEMICONDUCTOR WAFER AND PRODUCTION METHOD OF SEMICONDUCTOR CHIP

PROBLEM TO BE SOLVED: To provide a protective film for a semiconductor wafer, which can give little warpage and high flexural strength of a semiconductor wafer and can reduce fluctuations of the flexural strength, and to provide a production method of a semiconductor chip with high productivity.SOLU...

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Bibliographische Detailangaben
1. Verfasser: ICHIROKU NOBUHIRO
Format: Patent
Sprache:eng
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