CHARGED PARTICLE BEAM DEVICE

PROBLEM TO BE SOLVED: To perform efficient defect detection by creating an optimum-sized inspection template because in the prior art, in the case where a defect is detected by comparing a template image and an inspection subject image, if the template image is small, an effective inspection region will become small due to reduction in overlapping parts of the inspection subject image and the template because of, for example, imaging position deviation, and reversely if the template image is too large, the calculation time will become long by taking time for alignment processing of the template image and the inspection subject image.SOLUTION: A charged particle beam device synthesizes multiple images including regions that should have the same pattern at each of multiple dies, generates a template image with a size encompassing all the regions included in the images used for synthesis, and uses this template image and an inspection subject image of the pattern to detect a defect.