CHARGED PARTICLE BEAM DEVICE

PROBLEM TO BE SOLVED: To correct a charged particle beam irradiation position correctly, in a charged particle beam device such as a critical dimension SEM, while taking into account of a vibration at a part not appearing in stage position measurement, or a vibration at a part appearing, as false information, in stage position measurement.SOLUTION: In a process performing high magnification image pick-up from movement of a sample stage 2, low magnification image pick-up is performed in advance for the purpose of high accuracy alignment of an observation point. Based on the stage vibration information from a position detector 6 at the time of image pick-up in advance, and the optical system column vibration information of an electron optics system column 7 by a captured image using a secondary electron detector 13, a filter circuit 23 shapes the stage position information at the time of high magnification image pick-up according to a filter condition signal determined in a filter condition calculation unit 22. Based on the stage position information thus shaped, a deflection correction unit 24 determines a deflection correction signal and corrects the charged particle beam irradiation position.