DEFECT CORRECTION DEVICE, DEFECT CORRECTION SYSTEM, AND DEFECT CORRECTION METHOD

PROBLEM TO BE SOLVED: To accurately detect a defect in need of correction in an object and to correct the defect.SOLUTION: A defect correction device (1) extracts a defect classified as a correction object defect in a final inspection operation. Simultaneously, the defect correction device extracts...

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Bibliographische Detailangaben
1. Verfasser:	IMAI KATSUKI
Format:	Patent
Sprache:	eng
Schlagworte:	DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To accurately detect a defect in need of correction in an object and to correct the defect.SOLUTION: A defect correction device (1) extracts a defect classified as a correction object defect in a final inspection operation. Simultaneously, the defect correction device extracts a defect whose position coordinate coincides with a defect classified as a correction non-object defect in any previous inspection operations among defects that have been classified as the correction non-object defect in the final inspection operation to perform correction processing for an object having an extracted defect.