MANUFACTURING INSTALLATION OF METALHYDROXIDE, MANUFACTURING METHOD OF METALHYDROXIDE, AND SPUTTERING TARGET

PROBLEM TO BE SOLVED: To manufacture a metalhydroxide whose particle size is fine and uniform.SOLUTION: A metalhydroxide manufacturing installation which an anode 5 consisting of a metal of the metalhydroxide is arranged on the center and on the concentric circles of a columnar cathode 4 is used and...

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Bibliographische Detailangaben
Hauptverfasser:	KAMO TETSUO, TAKADA ISAO, SUGAMOTO NORIAKI, KIBE TATSUO
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS THEREFOR CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSESC01D OR C01F COMPOUNDS THEREOF DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTROLYTIC OR ELECTROPHORETIC PROCESSES ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTIONOF COMPOUNDS OR NON-METALS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To manufacture a metalhydroxide whose particle size is fine and uniform.SOLUTION: A metalhydroxide manufacturing installation which an anode 5 consisting of a metal of the metalhydroxide is arranged on the center and on the concentric circles of a columnar cathode 4 is used and the metalhydroxide is generated in electrolyte 3 by an electrolytic process.