SOLID STATE IMAGE SENSOR AND MANUFACTURING METHOD THEREFOR

PROBLEM TO BE SOLVED: To provide an easy-to-manufacture solid state image sensor producing homogeneous image data, and to provide a manufacturing method for solid state image sensor.SOLUTION: A solid state image sensor 1 includes a substrate 11, a plurality of photoelectric conversion parts 12 forme...

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Bibliographische Detailangaben
Hauptverfasser: AKAGI YUKO, OGAWA TAKAHIRO
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide an easy-to-manufacture solid state image sensor producing homogeneous image data, and to provide a manufacturing method for solid state image sensor.SOLUTION: A solid state image sensor 1 includes a substrate 11, a plurality of photoelectric conversion parts 12 formed in the substrate 11 and generating charges by performing photoelectric conversion of incident light, a first light shielding film 15 formed above the substrate 11 and shielding the light impinging on the photoelectric conversion part, and a second light shielding film 17 formed above the first light shielding film 15 and shielding the light impinging on the photoelectric conversion part 12. Furthermore, the solid state image sensor 1 is provided with a first area 30 through which light enters the photoelectric conversion part 12, a second area 50 which is shielded when the photoelectric conversion part 12 is covered with the second light shielding film 17, and a third area 90 located between the first area 30 and second area 50, and shielded when the photoelectric conversion part 12 is covered with the first light shielding film 15.