SUBSTRATE CONVEYANCE TRAY FOR FILM FORMING DEVICE AND EXTERNAL OPENING/CLOSING DRIVE DEVICE

PROBLEM TO BE SOLVED: To provide a substrate conveyance tray for a film forming device which holds a substrate in a plurality of directions while distributing a stress which acts on the substrate when holding the substrate.SOLUTION: The substrate conveyance tray comprises: a tray body 21 in which, w...

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Bibliographische Detailangaben

1. Verfasser:	IIO ITSUSHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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