SUBSTRATE CONVEYANCE TRAY FOR FILM FORMING DEVICE AND EXTERNAL OPENING/CLOSING DRIVE DEVICE

PROBLEM TO BE SOLVED: To provide a substrate conveyance tray for a film forming device which holds a substrate in a plurality of directions while distributing a stress which acts on the substrate when holding the substrate.SOLUTION: The substrate conveyance tray comprises: a tray body 21 in which, w...

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Bibliographische Detailangaben
1. Verfasser:	IIO ITSUSHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a substrate conveyance tray for a film forming device which holds a substrate in a plurality of directions while distributing a stress which acts on the substrate when holding the substrate.SOLUTION: The substrate conveyance tray comprises: a tray body 21 in which, when two directions orthogonal with a thickness direction of a substrate and crossing each other are defined as a first direction and a second direction, a pair of sides opposing in the first direction are parallel and a pair of sides opposing in the second direction are parallel; and a substrate support member 51 which is movable toward the center of the tray body while kept parallel with the sides and can be abutted to an end face of the substrate, and the substrate support member is mounted to each of sides 31-33.