OPTICAL ELEMENT ADJUSTING DEVICE, OPTICAL DEVICE, AND EXPOSURE METHOD AND APPARATUS

PROBLEM TO BE SOLVED: To suppress differences in temperature change characteristics between a plurality of optical elements caused by, for example, optical radiation or suppress differences in temperature in one optical element.SOLUTION: The adjusting device 28, for temperature change characteristic...

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Bibliographische Detailangaben
1. Verfasser:	KAMIJO KOICHI
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To suppress differences in temperature change characteristics between a plurality of optical elements caused by, for example, optical radiation or suppress differences in temperature in one optical element.SOLUTION: The adjusting device 28, for temperature change characteristics of a lens L3, includes: a lens holder 36A that retains the lens L3; temperature control blocks 38A1-38A4 that store a piping section 18B through which temperature-controlled liquid Co passes; and block controllers 50A-50D that adjusts a heat transfer time constant or thermal resistance between the lens holder 36A and the temperature control blocks 38A1-38A4.