SUBSTRATE SUPPORT DEVICE AND SUBSTRATE CHECKING DEVICE

PROBLEM TO BE SOLVED: To support a substrate at a horizontal posture.SOLUTION: While three support members 22 are respectively brought into contact with three contacted parts P1 of a substrate 100 and pressurized, they can support the substrate 100. Each support member 22 has a tip 22a linearly exte...

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Bibliographische Detailangaben
1. Verfasser: TOMOI TADASHI
Format: Patent
Sprache:eng
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