SUBSTRATE SUPPORT DEVICE AND SUBSTRATE CHECKING DEVICE

PROBLEM TO BE SOLVED: To support a substrate at a horizontal posture.SOLUTION: While three support members 22 are respectively brought into contact with three contacted parts P1 of a substrate 100 and pressurized, they can support the substrate 100. Each support member 22 has a tip 22a linearly extending on a virtual plane L. While the virtual plane on which the tip 22a extends and a thickness direction of the substrate 100 are parallel to each other, the tip 22a is arranged so that it can contact each contacted part P1 on an end face 101 of the substrate 100. A pressing force and an orientation of the pressing force to each contacted part P1 are defined so that the substrate 100 is maintained under a non-movement state and a non-rotation state.