INSPECTION DEVICE AND INSPECTION METHOD

PROBLEM TO BE SOLVED: To certainly inspect whether an inspecting object to be mounted is in a mounted state or a non-mounted state.SOLUTION: An inspection device includes: a measurement section 4 for measuring a physical quantity on the basis of a detection signal S2 detected in response to the supp...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SHIOIRI AKIHIRO, MURAYAMA RINTARO, TAKEUCHI GORO
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To certainly inspect whether an inspecting object to be mounted is in a mounted state or a non-mounted state.SOLUTION: An inspection device includes: a measurement section 4 for measuring a physical quantity on the basis of a detection signal S2 detected in response to the supply of a signal S1 for measurement to an inspecting object on a substrate 13; a processing section 6 for inspecting the substrate 13 on the basis of the physical quantity measured by the measurement section 4; and a ferromagnetic body 2 that is made of a ferromagnetic material and is disposed in a state close to the substrate 13. The measurement section 4 measures the physical quantity in the state in which the ferromagnetic body 2 is disposed closely to substrate 13. On the basis of the measured physical quantity, the processing section 6 inspects whether the inspecting object is in a mounted state or a non-mounted state.