METHOD OF REMOVING DAMAGED EPOXY FROM ELECTROSTATIC CHUCK

PROBLEM TO BE SOLVED: To provide an effective electrostatic chuck refurbishing system, method and apparatus so that a refurbished electrostatic chuck can be reused.SOLUTION: A method of removing an epoxy band from an electrostatic chuck includes a step of securing the electrostatic chuck in a servic...

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Bibliographische Detailangaben
Hauptverfasser:	HUANG TUOCHUAN, YANG FAN, NEAL NEWTON, RISH CHHATRE, SHIH HONG, CLIFF LACROIX
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an effective electrostatic chuck refurbishing system, method and apparatus so that a refurbished electrostatic chuck can be reused.SOLUTION: A method of removing an epoxy band from an electrostatic chuck includes a step of securing the electrostatic chuck in a servicing fixture, a step of applying a thermal source to the epoxy band to breakdown a plurality of adhesive bonds securing the epoxy band to the electrostatic chuck, a step of forming a hole in the epoxy band, and a step of pulling the epoxy band from the electrostatic chuck. A system for removing an epoxy band from an electrostatic chuck is also described.