VAPOR DEPOSITION MASK, AND METAL FRAME INTEGRATED VAPOR DEPOSITION MASK

PROBLEM TO BE SOLVED: To provide a vapor deposition mask that can be made highly fine and light even when it is made large, and that can prevent electric influences on a processing object, and a metal frame integrated vapor deposition mask in which the vapor deposition mask and the metal frame are f...

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Bibliographische Detailangaben
Hauptverfasser:	NISHIMURA SUKEYUKI, OBATA KATSUYA, TAKEDA TOSHIHIKO, KENMORI HIDESUKE
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a vapor deposition mask that can be made highly fine and light even when it is made large, and that can prevent electric influences on a processing object, and a metal frame integrated vapor deposition mask in which the vapor deposition mask and the metal frame are fixed.SOLUTION: In a vapor deposition mask, a resin mask having an opening corresponding to a pattern vapor deposition manufactured at a position overlaid on a slit is provided on a metallic mask with a slit. In the mask, (A) the resin mask contains a conductive material, or (B) a conductive layer is provided on the resin mask.