POSITIONING APPARATUS, EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To prevent deterioration of positioning accuracy due to fluctuation in the dimension of a gap between an electromagnet and a sucking target.SOLUTION: A positioning apparatus constituted so as to control relative positions of a first component and a second component comprises: an electromagnet fixed to the first component; a sucking target fixed to the second component so as to be sucked by the electromagnet; a magnetic flux sensor for detecting a magnetic flux value generated by the electromagnet; and a drive part for driving the electromagnet according to a deviation between a corrected magnetic flux command value obtained by correction of a magnetic flux command value according to the dimension of a gap between the electromagnet and the sucking target and the magnetic flux value detected by the magnetic flux sensor.